Warpage control for microelectronics packages

ABSTRACT

Techniques for reducing warpage for microelectronic packages are provided. A warpage control layer or stiffener can be attached to a bottom surface of a substrate or layer that is used to attach the microelectronics package to a motherboard. The warpage control layer can have a thickness approximately equal to a thickness of a die of the microelectronics package. A coefficient of thermal expansion of the warpage control layer can be selected to approximately match a CTE of the die. The warpage control layer can be formed from an insulating material or a metallic material. The warpage control layer can comprise multiple materials and can include copper pillar segments to adjust the effective CTE of the warpage control layer. The warpage control layer can be positioned between the microelectronics package and the motherboard, thereby providing warpage control without contributing to the z-height of the microelectronics package.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a division of, claims the benefit of and priority topreviously filed U.S. patent application Ser. No. 16/280,993 filed Feb.20, 2019, entitled “WARPAGE CONTROL FOR MICROELECTRONICS PACKAGES”,which is a continuation of, claims the benefit of and priority topreviously filed U.S. patent application Ser. No. 15/468,067 filed Mar.23, 2017, entitled “WARPAGE CONTROL FOR MICROELECTRONICS PACKAGES”,which applications are hereby incorporated by reference in theirentireties.

TECHNICAL FIELD

Embodiments described herein generally relate to microelectronic packagefabrication. More particularly, embodiments described herein relate toreducing warpage of microelectronic packages.

BACKGROUND

Microelectronic packages are generally required to have a low z-heightand low warpage to allow for solder mount onto a motherboard andreliable operation thereafter. A package-on-package (PoP) architecturethat includes a memory component mounted on top of a die of themicroelectronic package increases the height of the microelectronicpackage, thereby making a low z-height requirement more challenging.

A first conventional technique for reducing warpage involves adding corematerial to an organic substrate of the microelectronic package in orderto reduce the coefficient of thermal expansion (CTE) of the organicsubstrate. This technique, however, tends to significantly increase thez-height of the resulting microelectronics package.

Other conventional techniques for reducing warpage involve adding eithera metal stiffener or an organic substrate interposer on top of the dieof the microelectronic package. These techniques not only significantlyincrease the z-height of the microelectronics package but also introducesignificant processing challenges for attaching these additional layerson top of the die and managing the reliability of the interfaces.Further, these techniques can result in the consumption of valuable realestate on the package surface which can lead to an even larger packagethat can exacerbate warpage issues and also increase costs.

Coreless substrates are often used in microelectronic packages to reducez-height. However, use of coreless substrates can lead to increasedwarpage of the microelectronics package. Conventional techniques forreducing warpage of microelectronics packages that include corelesssubstrates generally increase the z-height or introduce additionalcomplex processing steps.

Accordingly, new techniques for reducing warpage of microelectronicspackages that may include coreless substrates while maintaining a lowz-height may be needed.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a side view of an embodiment of a microelectronicspackage in a first phase of fabrication.

FIG. 2 illustrates a side view of the embodiment of a microelectronicspackage depicted in FIG. 1 in a second phase of fabrication.

FIG. 3 illustrates a side view of the embodiment of a microelectronicspackage depicted in FIGS. 1 and 2 in a third phase of fabrication.

FIG. 4 illustrates a side view of a stiffener and an adhesive includedin the embodiment of the microelectronics package depicted in FIGS. 2and 3.

FIG. 5A illustrates a side view of the stiffener and the adhesivedepicted in FIG. 4 after undergoing a process for forming openings toaccommodate a ball grid array (BGA).

FIG. 5B illustrates a bottom view of the stiffener and the adhesivedepicted in FIG. 5B.

FIG. 6 illustrates an embodiment of a first logic flow.

FIG. 7 illustrates warpage control results of an embodiment of amicroelectronics package.

FIG. 8 illustrates a portion of a side view of an embodiment of amicroelectronics package.

FIG. 9 illustrates a bottom view of an embodiment of a warpage controllayer.

FIGS. 10A-F illustrate a process for fabricating a portion of themicroelectronics package depicted in FIG. 8.

FIG. 11 illustrates an embodiment of a second logic flow.

DETAILED DESCRIPTION

Various embodiments may be generally directed to reducing warpage formicroelectronic packages. A warpage control layer or stiffener can beattached to a bottom surface of a substrate or layer that is used toattach the microelectronics package to a motherboard. The warpagecontrol layer can have a thickness approximately equal to a thickness ofa die of the microelectronics package. A coefficient of thermalexpansion of the warpage control layer can be selected to approximatelymatch a CTE of the die. The warpage control layer can be formed from aninsulating material or a metallic material. The warpage control layercan comprise multiple materials and can include copper pillar segmentsto adjust the effective CTE of the warpage control layer. The warpagecontrol layer can be positioned between the microelectronics package andthe motherboard, thereby providing warpage control without contributingto the z-height of the microelectronics package.

Various embodiments may comprise one or more elements. An element maycomprise any structure arranged to perform certain operations. Althoughan embodiment may be described with a limited number of elements in acertain topology by way of example, the embodiment may include more orless elements in alternate topologies as desired for a givenimplementation. It is worthy to note that any reference to “oneembodiment” or “an embodiment” means that a particular feature,structure, or characteristic described in connection with the embodimentis included in at least one embodiment. The appearances of the phrases“in one embodiment,” “in some embodiments,” and “in various embodiments”in various places in the specification are not necessarily all referringto the same embodiment.

FIG. 1 illustrates a package or structure 100. The package 100 can besemiconductor package or structure. The package 100 can be an integratedcircuit (IC) package such as a central processing unit (CPU) and/or canbe a microelectronics package or structure. FIG. 1 illustrates thepackage 100 in a first phase of formation or fabrication.

The package 100 can include a die 102 and a substrate 104. The substrate104 can be a coreless substrate or a cored substrate. In variousembodiments described herein, the substrate 104 is considered to be acoreless substrate 104. The die 102 can be a microelectronicssemiconductor die such as, for example, a silicon die. The die 102 canbe coupled or attached to the coreless substrate 104. The die 102 can beconnected to the coreless substrate 104 by one or more connectors 106.The connectors 106 can include, for example, connectors extending fromthe die 102 and/or solder balls positioned between the die 102 and thecoreless substrate 104. The package 100 can further include an underfill108 positioned between the die 102 and the coreless substrate 104.

The coreless substrate 104 can include package-on-package (PoP) lands orconnection pads 110. The PoP lands 110 can be positioned on a topsurface of the coreless substrate 104. The PoP lands 110 can bepositioned on either side of the die 102. The PoP lands 110 can beformed from a conductive material.

The coreless substrate 104 can further include ball grid array (BGA)lands or connection pads 112. The BGA lands 112 can be positioned on abottom surface of the coreless substrate 104. The BGA lands 112 can bearranged in any type of pattern or array. The BGA lands 112 can bedistributed across an entirety of the bottom surface of the corelesssubstrate 104 or a portion thereof. The BGA lands 112 can be formed froma conductive material.

The die 102 can be attached to the coreless substrate 104 using standardchip attach and underfill processes. A thickness of the die 102 can beselected based on PoP pitch and assembly yield. As an example, thethickness of the die 102 can be on the order of approximately 100 μm fora PoP pitch of approximately 300-400 μm.

FIG. 2 illustrates the package 100 in a second phase of formation orfabrication, for example, subsequent to the processing phase shown inFIG. 1. As shown in FIG. 2, the package 100 can additionally include astiffener 202 attached to the coreless substrate 104 by an adhesive 204.The stiffener 202 and the adhesive 204 can be positioned on the bottomsurface of the coreless substrate 104 on portions of the bottom surfacethat do not include the BGA lands 112. As a result, open areas oropenings 206 can be formed adjacent to the attached portions of thestiffener 202 and the adhesive 204 and above the BGA lands 112. In asubsequent phase of formation or processing, to be discussed in moredetail below, the open areas 206 can be formed so as to later acceptsolder for attachment to a motherboard or other electronics board.

According to various embodiments, a choice of material, a thickness,and/or other properties of the stiffener 202 can be selected based onthe structure of the package 100 to achieve a desired warpage controlfor the package 100. The thickness of the die 102 can be used todetermine one or more of the choice of material, the thickness, and/orthe other properties of the stiffener 202. The stiffener 202 can be madefrom a variety of materials including, for example, stainless steel,silicon, and glass. The choice of material for the stiffener 202 can bebased on cost and desired warpage control.

The stiffener 202 can be used to mechanically balance out the die 102attached to the top of the coreless substrate 104. Accordingly, thethickness of the stiffener 202 can be on the same order as the die 102,or can have a thickness approximately equal to a thickness of the die102. Further, a coefficient of thermal expansion (CTE) of the stiffener202 can be selected to approximately match the CTE of the die 102. Thestiffener 202 can be positioned on the underside of the corelesssubstrate 104 and above a motherboard or other electronics board. Assuch, a thickness of the stiffener 202 can be designed to fit within apre-existing space or gap between the bottom of the coreless substrate104 and a motherboard or other electronics board to which the package100 is to be connected. As an example, the thickness of the stiffener202 can be minimized to fit within the BGA space reserved for underneaththe coreless substrate 104.

In various embodiments, the stiffener 202 can be selected from aninsulating material. For example, the stiffener 202 can be a silicon orglass material. When an insulating material is selected for use as thestiffener 202, adhesive lamination on top of the stiffener 202 can beperformed (e.g., as shown in FIG. 2). Specifically, the insulatingmaterial selected for use as the stiffener 202 can be coupled to thecoreless substrate 104 using an adhesive (e.g., the adhesive 204 asshown in FIG. 2). Selection of the adhesive 204 can be based on ensuringadequate mechanical coupling between the stiffener 202 and the corelesssubstrate 104 after a curing process used to promote adhesion using theselected adhesive.

Further, for a stiffener 202 that is an insulating material, formationof the open spaces 206 as shown in FIG. 2 can be performed after thestiffener 202 is attached to the coreless substrate 104. That is, aninsulating stiffener 202 can be mechanically attached to the entirebottom surface of the coreless substrate 104 using the adhesive 204 suchthat the adhesive 204 and the insulating stiffener 202 cover the BGAlands 112. During a subsequent processing step, the openings 206 can beformed. As an example, laser drilling can be used to form the openspaces 206. In various embodiments, the pattern of the laser drillingcan be consistent with the BGA design for the underside of the corelesssubstrate 104. Further, a diameter of one or more of the openings 216formed by laser drilling can be made to be slightly larger than the BGAball size diameter (e.g., a diameter of the BGA lands 112). In variousembodiments, formation of the open spaces 206 can be performed beforethe insulating stiffener 202 is attached to the coreless substrate 104.That is, the openings 206 can be formed in the insulating stiffener 202and then laminating the adhesive 204 onto the insulating stiffener 202for attachment to the coreless substrate 104.

In various embodiments, the stiffener 202 can be selected from aconductive material. For example, the stiffener 202 can be a metallicmaterial such as stainless steel. When a metallic material is selectedfor use as the stiffener 202, the openings 206 can be formed into themetallic stiffener 202 prior to the metallic stiffener 202 being adheredto the coreless substrate 104. For example, a metallic stiffener 202 canbe first subjected to a laser drilling process to create openings in themetallic stiffener 202 to correspond with the openings 206 shown in FIG.2. The laser drilling process can be used to form the openings 206 forthe BGA. After laser drilling, a coating process can be implemented tocover the metallic stiffener 202 with an insulating and stable barrier.

After the coating process, the metallic stiffener 202 can undergo anadhesive lamination process. In various embodiments, an adhesive can beused to adhere the metallic stiffener 202 to the underside of thecoreless substrate 104. During the adhesive lamination process, anadhesive layer can be formed over the BGA openings 206. This thinadhesive layer can be removed during a subsequent processing step by wayof a punching process or a laser ablation process. Whether an insulatingstiffener 202 or a metallic stiffener 202 is used, the package 100 canundergo a curing process to cure the selected adhesive to ensuremechanically stable coupling of the stiffener 202 to the corelesssubstrate 104. The coreless substrate 104 can be considered to be anintermediate substrate as it is positioned between the die 102 and thestiffener 202.

FIG. 3 illustrates the package 100 in a third phase of formation orfabrication, for example, subsequent to the processing phase shown inFIG. 2. As shown in FIG. 3, the package 100 can additionally includesolder balls 302. The solder balls 302 can form a BGA. The solder balls302 can be positioned over the BGA lands 112 and between the portions ofthe stiffener 202 and the adhesive 204 positioned between the BGA lands112. The solder balls 302 can be used to attach the package 100 to amotherboard or other electronics board.

The solder balls 302 can be attached during a ball attach process. Theball attach process can be a flux printing process or a flux sprayprocess that can be followed by a standard ball placement and reflowprocess. Flux printing may be possible due to the relatively lowthickness of the stiffener 202.

As an example ball attach process, for an approximately 400 μm BGApitch, a standard 9 mil solder ball can have a height of approximately170 μm post reflow. This ball height can be sufficient to accommodate acombination of the stiffener 202 and the adhesive 204 having a combinedthickness of approximately 100 μm. In various embodiments, the openings206 between the stiffener portions 202 can help prevent solder frombridging between adjacent solder balls 302. As a result, relativelylarger solder balls 302 can be used which, in turn, can provide evenmore space between the coreless substrate 104 and the board to which itwill attach.

After a ball attach process (e.g., as shown in FIG. 3), the package 100can undergo a flux dipping and pickup and placement process during whichthe package 100 (e.g., as a CPU) can be positioned on an electronicsboard (e.g., a motherboard). Memory packages can also be placed on topof the package 100 followed by mass reflow.

The use of the stiffener 202 can reduce the space available for the BGAsolder balls 302 to collapse between the package 100 and the electronicsboard to which it will attach (not shown in FIG. 3 for simplicity).However, the improved warpage control provided by the stiffener 202 canensure acceptable or improved surface-mount technology (SMT) yield.

The package 100 and the techniques described herein can provide forwarpage control over a wide range of temperatures. The corelesssubstrate can have a relatively high CTE while the die 102 can have arelatively low CTE. Due of this CTE mismatch, absent the stiffener 202,warpage can be significant for any die attached to any corelesssubstrate. The package 100 and the techniques described herein canbalance the CTE of the die 102 with a stiffener 202 on the other side ofthe coreless substrate 104, thereby significantly reducing warpageexperienced by the package 100.

Further, by placing the stiffener 202 on the bottom surface of thecoreless substrate 104, the z-height of the package 100 can remainrelatively low and lower than other packages that include corelesssubstrates that attempt to control warpage by using techniques limitedto the same side on which the die is positioned. Overall, the package100 and the techniques described herein can create a symmetricalmechanical configuration of die 102—coreless substrate 104—stiffener 202to enable improved warpage control at both room temperature and reflowtemperature. Further, the package 100 and the techniques describedherein can utilize the existing space between the coreless substrate 104and the electronics board with little to no impact to the z-height ofthe package 100. In various embodiments, the stiffener 202 can beconsidered to be a warpage control layer intended to improve the warpageof an arrangement (e.g., the package 100) to which it is a part.

The package 100 and the techniques described herein provide numerousadvantages over conventional techniques for warpage control in packagesthat use coreless substrates or cored substrates. First, the symmetricalconfiguration of the package 100 (e.g., the die 102—the corelesssubstrate 104—the stiffener 202 configuration as depicted in FIGS. 1-3)can provide improved warpage control capability with low complexity.Second, warpage control can be provided at all temperatures (e.g., roomtemperature and reflow temperature). Third, by placing the stiffener 202on the bottom of the coreless substrate 104, the z-height of the package100 can be unaffected or even reduced. Fourth, the coreless substrate104 can be provided with first level interconnect (FLI) scalingcapability even with the lowest possible z-height. Fifth, the assemblyprocess can be simplified by eliminating complex processing steps whilestill providing a PoP architecture. Lastly, flexibility in designchoices is afforded by choices in material type, thicknesses, andmechanical properties of the stiffener 202 to balance the die 102 on thetop of the coreless substrate 104.

FIG. 4 illustrates a representative side view of the stiffener 202 andthe adhesive 204 prior to undergoing a process for forming openings toaccommodate a BGA. As described above, the stiffener 202 can comprise aninsulating material (e.g., glass or silicon) or can comprise a metallicmaterial (e.g., stainless steel).

FIG. 5A illustrates a representative side view of the stiffener 202 andthe adhesive 204 after undergoing a process for forming openings toaccommodate a BGA. As shown in FIG. 5A, the process can form openings206. The openings 206 can be formed in positons corresponding to oraligned with BGA landings provided on a bottom side of the corelesssubstrate 104. The process for forming the openings can include a laserdrilling process.

FIG. 5B illustrates a bottom view of the stiffener 202 and the adhesive204 after undergoing a process for forming openings to accommodate aBGA. As shown in FIG. 5B, the openings 206 can form a pattern consistentwith a BGA design for the underside of the coreless substrate 104. Thediameters of the openings 206 can each be of generally the sameapproximate size and can be designed to be slightly larger than theexpected BGA ball size diameter.

FIG. 6 illustrates an example of a logic flow 600 that may berepresentative of a process for forming or fabricating a package havingimproved warpage control and low z-height. For example, logic flow 600may be representative of operations that may be performed to form thepackage 100 as shown and described in relations to FIGS. 1-5.

At 602, a die can be attached to a substrate. The die can be a silicondie. The substrate can be a cored substrate or a coreless substrate. Invarious embodiments, the substrate can be a coreless substrate. Thecoreless substrate can include PoP lands and can include BGA lands. Thedie thickness can be based on PoP pitch and assembly yield. A standardchip attach and underfill process can be used to attach the die to thecoreless substrate.

At 604, a stiffener can be selected and attached to a bottom surface ofthe coreless substrate. The stiffener can be selected based a thicknessof the die and a desired warpage control. The stiffener can have a CTEthat is similar to the CTE of the die. A thickness of the stiffener canbe similar or approximately the same as the thickness of the die. Thestiffener can be attached to the bottom surface of the corelesssubstrate using an adhesive that can be cured during a curing process.

The stiffener can comprise an insulating material (e.g., silicon orglass) or can comprise a metallic material (e.g., stainless steel). Ifan insulating stiffener is selected, an adhesive lamination process canbe used to attach the stiffener to the underside of the corelesssubstrate. Once attached, the insulating stiffener can undergo a laserdrilling process to create openings to enable ball attach in asubsequent operation.

If a metallic stiffener is selected, then a laser drilling process canbe performed prior to attaching the metallic stiffener to the corelesssubstrate. After undergoing a laser drilling process to form openings toenable ball attach in a subsequent operation, the metallic stiffener canundergo a coating process to create an insulating layer over an entiretyof the metallic stiffener. Subsequent to the coating process, themetallic stiffener can undergo an adhesive lamination process tomechanically attach the metallic stiffener to the coreless substrate.Any additional adhesive layer remaining over openings intended for ballattach can be removed through a punching process or another laserablation process.

Whether a metallic or insulating stiffener is used, the pattern of laserdrilling can be consistent with a BGA design. Further, the diameter ofthe openings formed by the laser drilling process can be slightly largerthan the diameter of the BGA ball size. Further, a curing process can beused to cure the adhesive selected for adhering the stiffener to thecoreless substrate.

At 606, solder balls can be attached to the coreless substrate. Thesolder balls can be attached according to the BGA design and within theopenings in the stiffener provided by the laser drilling process. Thesolder balls can be attached using, for example, a flux printing or aflux spray operation followed by a standard ball placement and reflowprocess. The solder balls can be deposited so as to be attached orcoupled to the BGA lands provided on the coreless substrate.

At 608, the package can be attached to an electronics board. As anexample, the die-coreless substrate-stiffener package can be attached toa motherboard. As part of this process, the package can undergo a fluxdipping and pick up and place operation to position the packageprecisely onto a motherboard. Subsequent to placement on a motherboard,one or more memory packages can be attached to the package using the PoPlands.

FIG. 7 illustrates simulated results comparing warpage control by apackage using a stiffener as described herein and a package that doesnot include a stiffener positioned on a bottom surface of a corelesssubstrate. For the simulated results, two coreless substrate were used,each with a 117 mm² die having a thickness of 81 μm attached to a top ofthe coreless substrates. A silicon stiffener having a thickness of 60 μmand an area of 196 mm² was attached to a bottom of one of the corelesssubstrates. Approximately 25% of the surface area of the stiffener wasopened for BGA placement. An adhesive having a thickness ofapproximately 20 μm was used to attach the stiffener to the corelesssubstrate and cured at a temperature of approximately 150 to 170° C.

Bar 702-A shows the warpage of the coreless substrate that did notinclude the stiffener at approximately room temperature. As shown, thewarpage for the coreless substrate without stiffener is approximately350 μm.

Bar 704-A shows the warpage of the coreless substrate that did includethe stiffener at approximately room temperature. As shown, the warpagefor the coreless substrate with stiffener is approximately 40 μm.

Bar 702-B shows the warpage of the coreless substrate that did notinclude the stiffener at an approximately surface mount reflowtemperature. As shown, the warpage for the coreless substrate withoutstiffener is increased to over approximately 350 μm.

Bar 704-B shows the warpage of the coreless substrate that did includethe stiffener at the approximately surface mount reflow temperature. Asshown, the warpage for the coreless substrate with stiffener remains atapproximately 40 μm. That is, the warpage of the coreless substratehaving the silicon stiffener remained largely unchanged across thedifferent temperatures and was significantly less than the warpageexperienced by the coreless substrate that did not include a stiffener.

FIG. 8 illustrates a portion of a package or structure 802 attached toan electronics board 804. The package 802 can be an integrated circuit(IC) package such as a central processing unit (CPU) and/or can be amicroelectronics package or structure. The electronics board 804 can bea motherboard. The package 802 can represent an alternative arrangementand process for controlling warpage.

The package 802 can include a die 806. The die 806 can be amicroelectronics semiconductor die such as, for example, a silicon die.A first layer or substrate 808 can be adjacent to a bottom surface ofthe die 806. The first layer or substrate 808 can be a C4 layer orsubstrate. A second layer or substrate 810 can be adjacent a bottomsurface of the C4 substrate 808. The second layer or substrate 810 canbe a build-up layer substrate.

A third layer or substrate 812 can be adjacent a bottom surface of thebuild-up layer substrate 810. The third layer or substrate can be awarpage control substrate. In various embodiments, the warpage controlsubstrate 812 can include glass regions 814 and copper pillar regions816. The copper pillar regions 816 can be mechanically bonded to theglass regions 814. The CTE of the glass regions can generallyapproximately match the CTE of the die 806. The copper pillars 816 canincrease the effective CTE of the warpage control substrate or layer812. Solder (not shown for simplicity in FIG. 8) can also be positionedunder portions of the substrate 812 including under the copper pillarregions 814. This solder can form solder joints under one or more copperpillar regions 816 that is provided by any solder paste printed on theboard 804.

A memory component 818 can be positioned above the die 806. The memorycomponent 818 can be attached or coupled to the build-up layer substrate810 using PoP multilevel interconnect (MLI) joints 820 The POP MLIjoints can be made of solder (e.g., solder balls). The memory component818 can be any memory device. In various embodiments, the memorycomponent 818 can be a low power double data rate (DDR) dynamicrandom-access memory (DRAM) (LPDDR) memory such as Mobile DDR orLPDDR4x.

The package 802 can be coupled or attached to the motherboard 804 usinginput/output (I/O) bumps 822. The I/O bumps can be made of solder (e.g.,solder balls). One or more of the various constituent layers forming thepackage 800 can be coupled or attached together or to an adjacent layeror substrate using adhesives.

The C4 layer 808 and the build-up layer 810 can be considered to beintermediate substrates or layers as they are positioned between the die806 and the warpage control layer 812.

The warpage control substrate or layer 812 can be used to offset orcontrol warpage that may be experienced by one or more of the othercomponents of the package 802 (e.g., the die 806). By positioning thewarpage control layer 812 underneath the build-up layer 810, the warpagecontrol layer 812 can be added to the package 802 without contributingto the z-height of the package 802 (or further increasing the height ofthe package 802). The number and arrangement of the copper pillars 816and the solder balls 822 can be optimized to reduce warpage experiencedby the package 802 including CTE mismatch from the die 806 as well asother components of the package 802.

In various embodiments, the package 802 can maintain a relatively lowz-height despite the addition of the warpage control layer 812. Forexample, the I/O bumps 822 can have a height of approximately 90 μm, thecopper pillars 816 can have a height of approximately 90 μm±20 μm, thebuild-up layer 810 can have a height of approximately 66 μm, the C4layer 808 can have a height of approximately 30 μm, the die 806 can havea height of approximately 80 μm, the PoP MLI joints 820 can have aheight of approximately 95 μm, and the memory component 818 can have aheight of approximately 380 μm, such that a height from a top of themotherboard to a bottom of the memory component 818 (indicated as height824 in FIG. 8) can be approximately 320 μm (nominal height) and a heightfrom the top of the motherboard to a top of the memory component 818(indicated as height 826 in FIG. 8) can be approximately 700 μm (nominalheight).

FIG. 9 illustrates a bottom view of a warpage control layer 900. Thewarpage control layer 900 can represent the warpage control layer 812shown in FIG. 8. The warpage control layer 900 can include a glasssubstrate 902 that includes copper pillar segments 904 positioned withinan interior portion of the warpage control layer 900. In variousembodiments, materials other than copper can be used for the pillars904. Open spaces 906 can be positioned at an outer portion of thewarpage control layer 900. The open spaces 906 can provide areas forsecond level interconnects (SLIs), in particular, solder balls 908. Thesolder balls 908 can represent the I/O bumps 822 depicted in FIG. 8.Further, the copper pillars 904 can represent the copper pillars 816depicted in FIG. 8. The thickness or height of the warpage control layer900, and in particular the thickness or height of the glass substrate902, can be approximately the same height as the die of a package ofwhich the warpage control layer 900 is a part (e.g., a height of the die806 of the package 802 as depicted in FIG. 8).

The copper pillars 904 and the open spaces 906 can generally be formedinto rounded or circular shapes but are not so limited. The copperpillars 904 and the open spaces 906 can be arranged to form any patternon the glass substrate 902. In general, the copper pillars 904 and theopen spaces 906 can form an array of any size (e.g., any number of rowsor columns). As shown in FIG. 9, the opens spaces 906 can include thetwo outer columns on either side of the glass substrate 902 but are notso limited. In various embodiments, the open spaces 906 and the solderballs may occupy only one outer column on either side of the glasssubstrate 902.

The solder balls/solder joints 908 positioned on a periphery of theglass substrate 902 can be full solder joints to enable improved solderjoint reliability. The copper pillars 904 can provide for improvedwarpage balance. Laser drilling can be used to form the array used forthe copper pillars 904 and the open spaces 906. In various embodiments,depending on warpage requirements, one or more of the copper pillars 904and the open spaces 906/solder balls 908 can be eliminated.

The package 802—in particular, introduction of the warpage control layer812 as shown in FIG. 8 and as represented as warpage control layer 902in FIG. 9—provides numerous benefits over conventional techniques forreducing warpage. First, the techniques and structures described hereindo not contribute to z-height, thereby reducing stack-up heightsignificantly. Second, glass materials that can be used as part of thetechniques and structures described herein are readily available andhave a CTE that approximately matches that of a die used in the combinedpackage (e.g., generally on the order of 3·10⁻⁶/° C.). Third, thearchitecture shown in FIG. 8 enables direct memory attach withoutpre-stacking. Fourth, well known adhesives can be used between thewarpage control layer (e.g., the warpage control layer 812) and anyadjacent layers (e.g., the build-up layer 810).

FIGS. 10a-f illustrate a process for fabricating a portion of thepackage 802 illustrated in FIG. 8. In particular, FIGS. 10a-fillustrates a process for fabricating the warpage control layer 812 andthe build-up layer 810.

As shown in FIG. 10A, a glass base 1002 or other base comprising anothermaterial can be provided. In FIG. 10B, the glass base 1002 is shown witha copper layer 1004. The copper layer 1004 can be positioned onto asurface of the glass base 1002. The copper layer 1004 can cover anyportion of the glass base 1002. The copper layer 1004 can be positionedonto the glass base 1002 by, for example, laminating, depositing, orplating the glass base 1002 with the copper layer 1004. The copper layer1004 can include one or more distinct non-connected portions of copperattached to the glass base 1002. Alternatively, the copper layer 10004can cover an entire surface of the glass base 1002.

As shown in FIG. 10C the copper layer 1004 can be modified.Specifically, the copper layer 1004 can be modified by lithography oretching techniques to modify the originally deposited copper layer 1004(as shown in FIG. 10B) into any desired pattern, size, and/or shape. Invarious embodiments, the copper layer 1004 can be modified to form oneor more copper connection pads. Further, as shown in FIG. 10C, abuild-up layer 1006 can be positioned onto the glass base 1002. Invarious embodiments, the build-up layer 1006 can be provided bylamination and/or etching to form a layer adjacent to the glass base1002 and the copper layer 1004. For example, the build-up layer 1006 canbe positioned over the glass base 1002 and the copper layer/copper pads1004.

As shown in FIG. 10D, the arrangement of the glass base 1002, the copperlayer 1004, and the build-up layer 1006 can be flipped. Further, invarious embodiments, depending on the choice of glass used for the glassbase 1002, openings 1008 can be made in the glass base 1002. Theopenings 1008 can be made to accommodate copper pillars and/or solderballs. The openings 1008 can be made in the glass base 1002 byphotoresist coating and etching of the glass base 1002. The openings1008 can also be made by laser drilling. In various embodiments, theglass base 1002 can be originally formed to include the openings 1008through, for example, a photoresist and etching process. The openings1008 can be positioned so as to be aligned with the copper layer/copperpads 1004.

As shown in FIG. 10E, copper pillars 1010 can be deposited or grown incertain openings 1008. The copper pillars 1010 can be provided toapproximately a height of the glass base 1002. Certain openings 1008 maynot be used for copper pillars 1010 and may be reserved for solderballs. A dry film resist (DFR) layer 1112 can be positioned over theglass base 1002. In various embodiments, the DFR layer 1112 can bepositioned over portions of the glass base 1002 so as to expose thecopper pillars 1008. Further, the DFR layer 1112 can be positioned overopenings 1008 that are not intended to house copper pillars 1010. TheDRF layer 1112 can be a protection layer and can provide protection forthe openings 1008 where a copper pillar is not deposited. Thearrangement depicted in FIG. 10E can be stored until ready for useincluding subsequent chip attach processes.

In FIG. 10F, the DFR layer 1112 can be removed. The glass base 1002 canonce again be flipped and prepared for subsequent processing stepsincluding chip attach (e.g., attaching a die to the build-up layer1006), ball attach (e.g., within the opening 1008), and singulation ofthe glass base 1002 (e.g., in embodiments where the arrangement depictedin FIG. 10F is fabricated in bulk and singulated for subsequentindividual use). The glass base 1002, the build-up layer 1006, theopening 1008, and the copper pillars 1010 can represent the build-uplayer 810 and the warpage control layer 812 as depicted in FIG. 8.Further, the glass base 1002, the opening 1008, and the copper pillars1010 can represent the warpage control layer 812 in particular. Theglass base 1002, the opening 1008, and the copper pillars 1010 can alsorepresent the warpage control layer 900 with copper pillars 1010representing the copper pillars 904 and the opening 1008 representing aspace to accept the solder balls 908.

FIG. 11 illustrates an example of a logic flow 1100 that may berepresentative of a process for forming a portion of a package havingimproved warpage control and low z-height. For example, logic flow 1100may be representative of operations that may be performed to form aportion of the package 800 or warpage control layer 900 as shown anddescribed in relations to FIGS. 8 and 9, respectively.

At 1102, a glass base is provided. At 1104, a copper layer can beprovided on the glass base. The copper layer can cover any portion ofthe glass base. The copper layer can be added by laminating, depositing,or plating the copper layer onto a surface of the glass base. Anypattern or arrangement can be formed into the copper layer bylithographic and etching techniques.

At 1106, on or more build-up layers can be provided. The build-up layerscan be positioned onto the glass base on a same surface side as thecopper layer. The build-up layers can be provided by lamination ANDetching techniques.

At 1108, one or more openings can be formed into the glass base. Theopenings can be made by laser drilling or can be formed by photoresistcoating and etching techniques. In various embodiments, the initiallyprovided glass base can be formed through photo-definable techniques.The openings can be provided to form any desired pattern or arrangement,such as the arrangement shown in FIG. 9. The openings can be used insubsequent processing steps for placement of copper pillars or solderballs.

At 1110, copper pillars can be provided in certain openings in the glassbase. The copper pillars can be provided to make contact with a portionof the copper layer. A portion of the openings can be reserved forsubsequent filling by solder balls. The glass base can be covered by aprotection layer such as, for example, a DFR layer. The DFR layer can bepositioned over the glass base over portions where the copper pillarsare not present and over openings reserved for subsequent filling bysolder balls.

At 1112, subsequent processing can be performed. Subsequent processingcan include singulation, removal of the DFR layer, solder ball attachand attachment to a motherboard, die attach, and/or attachment to one ormore additional layers.

The following examples pertain to further embodiments:

Example 1 is a microelectronics package comprising a microelectronicsdie, one or more intermediate substrates positioned under themicroelectronics die, and a warpage control layer positioned under theone or more intermediate substrates.

Example 2 is an extension of Example 1 or any other example disclosedherein, wherein the one or more intermediate substrates includes acoreless substrate.

Example 3 is an extension of Example 2 or any other example disclosedherein, wherein the microelectronics die is attached to a top surface ofthe coreless substrate and the warpage control layer is attached to abottom surface of the coreless substrate.

Example 4 is an extension of Example 3 or any other example disclosedherein, wherein the warpage control layer is attached to the bottomsurface of the coreless substrate by an adhesive.

Example 5 is an extension of Example 4 or any other example disclosedherein, wherein the coreless substrate includes one or morepackage-on-package (PoP) connection pads positioned on the top surfaceof the coreless substrate.

Example 6 is an extension of Example 4 or any other example disclosedherein, wherein the coreless substrate includes one or more ball gridarray (BGA) connection pads on the bottom surface of the corelesssubstrate.

Example 7 is an extension of Example 4 or any other example disclosedherein, wherein the warpage control layer comprises a stiffener.

Example 8 is an extension of Example 7 or any other example disclosedherein, wherein the stiffener comprises a metallic stiffener.

Example 9 is an extension of Example 8 or any other example disclosedherein, wherein the metallic stiffener comprises stainless steel.

Example 10 is an extension of Example 7 or any other example disclosedherein, wherein the stiffener comprises an insulating stiffener.

Example 11 is an extension of Example 10 or any other example disclosedherein, wherein the insulating stiffener comprises glass.

Example 12 is an extension of Example 10 or any other example disclosedherein, wherein the insulating stiffener comprises silicon.

Example 13 is an extension of Example 7 or any other example disclosedherein, wherein the stiffener includes open spaces for solder forconnection to the BGA connection pads.

Example 14 is an extension of Example 7 or any other example disclosedherein, wherein a thickness of the stiffener is approximately equal to athickness of the microelectronics die.

Example 15 is an extension of Example 7 or any other example disclosedherein, wherein a coefficient of thermal expansion (CTE) of thestiffener is approximately equal to a CTE of the microelectronics die.

Example 16 is an extension of Example 1 or any other example disclosedherein, wherein the one or more intermediate substrates includes a C4layer and a build-up layer.

Example 17 is an extension of Example 16 or any other example disclosedherein, wherein the C4 layer is attached to a bottom surface of themicroelectronics die and the build-up layer is attached to a bottomsurface of the C4 layer.

Example 18 is an extension of Example 17 or any other example disclosedherein, wherein the warpage control layer is attached to a bottomsurface of the build-up layer.

Example 19 is an extension of Example 18 or any other example disclosedherein, wherein the warpage control layer comprises a glass substrate.

Example 20 is an extension of Example 19 or any other example disclosedherein, wherein the glass substrate includes copper pillar segments.

Example 21 is an extension of Example 19 or any other example disclosedherein, wherein the copper pillar segments are positioned on an interiorof the glass substrate and one or more openings for solder arepositioned on a periphery of the glass substrate.

Example 22 is an extension of Example 18 or any other example disclosedherein, wherein a thickness of the warpage control layer isapproximately equal to a thickness of the microelectronics die.

Example 23 is an extension of Example 18 or any other example disclosedherein, wherein a CTE of the glass substrate is approximately equal to aCTE of the microelectronics die.

Example 24 is an extension of Example 1 or any other example disclosedherein, further including a memory component attached to a top surfaceof at least one of the one or more intermediate substrates and over themicroelectronics die.

Example 25 is an extension of Example 1 or any other example disclosedherein, further including a motherboard attached to a bottom surface ofat least one of the one or more intermediate substrates such that thewarpage control layer is positioned in a space between the bottomsurface and the motherboard.

Example 26 a method of fabricating a microelectronic device comprisingattaching a microelectronics die to a top surface of a corelesssubstrate, attaching a stiffener to a bottom surface of the corelesssubstrate using an adhesive, attaching solder to the bottom surface ofthe coreless substrate, and attaching the microelectronics die, corelesssubstrate, and stiffener to a motherboard using the solder, wherein thestiffener is positioned between the motherboard and the corelesssubstrate.

Example 27 is an extension of Example 26 or any other example disclosedherein, further comprising selecting a thickness of the stiffener to beapproximately equal to a thickness of the microelectronics die.

Example 28 is an extension of Example 26 or any other example disclosedherein, further comprising selecting a coefficient of thermal expansion(CTE) of the stiffener to approximately equal a CTE of themicroelectronics die.

Example 29 is an extension of Example 26 or any other example disclosedherein, further comprising selecting the stiffener to be an insulatingstiffener.

Example 30 is an extension of Example 29 or any other example disclosedherein, further comprising laser drilling the insulating stiffener afterattaching the insulating stiffener to the coreless substrate to formopenings in the insulating substrate for the solder.

Example 31 is an extension of Example 26 or any other example disclosedherein, further comprising selecting the stiffener to be a metallicstiffener.

Example 32 is an extension of Example 31 or any other example disclosedherein, further comprising laser drilling the metallic stiffener priorto attaching the metallic stiffener to the coreless substrate to formopenings in the metallic substrate for the solder.

Example 33 is an extension of Example 26 or any other example disclosedherein, further comprising attaching a memory component to the topsurface of the coreless substrate over the microelectronics die.

Example 34 is a method of fabricating a microelectronic devicecomprising providing a glass base, forming copper pads on a top surfaceof the glass base, forming a build-up layer on the top surface of theglass base and over the copper pads, forming openings in the glass basealigned with the copper pads, providing copper pillar segments in one ormore interior openings of the glass base, attaching a microelectronicsdie to the build-up layer, depositing solder in one or more outeropenings in the glass base, and attaching the build-up layer to amotherboard using the solder such that the glass base is positionedbetween the motherboard and the build-up layer.

Example 35 is an extension of Example 34 or any other example disclosedherein, wherein forming the copper pads comprises depositing a copperlayer and etching the copper layer.

Example 36 is an extension of Example 34 or any other example disclosedherein, wherein forming the build-up layer comprises laminating thebuild-up layer to the glass base.

Example 37 is an extension of Example 34 or any other example disclosedherein, wherein forming the openings comprises etching the glass base.

Example 38 is an extension of Example 34 or any other example disclosedherein, wherein forming the openings comprises laser drilling the glassbase.

Example 39 is an extension of Example 34 or any other example disclosedherein, wherein the openings form an array.

Example 40 is an extension of Example 34 or any other example disclosedherein, wherein a height of each of the copper pillar segments isapproximately equal to a thickness of the glass base.

Example 41 is an extension of Example 34 or any other example disclosedherein, wherein a thickness of the glass substrate is approximatelyequal to a thickness of the microelectronics die.

Example 42 is an extension of Example 34 or any other example disclosedherein, wherein attaching the microelectronics die to the build-up layercomprises attaching the microelectronics die to a C4 layer that isattached to the build-up layer.

Example 43 is an extension of Example 34 or any other example disclosedherein, wherein a coefficient of thermal expansion (CTE) of the glassbase approximately matches a CTE of the microelectronics die.

Numerous specific details have been set forth herein to provide athorough understanding of the embodiments. It will be understood bythose skilled in the art, however, that the embodiments may be practicedwithout these specific details. In other instances, well-knownoperations, components, and structures have not been described in detailso as not to obscure the embodiments. It can be appreciated that thespecific structural and functional details disclosed herein may berepresentative and do not necessarily limit the scope of theembodiments.

It should be noted that the methods described herein do not have to beexecuted in the order described, or in any particular order. Moreover,various activities described with respect to the methods identifiedherein can be executed in serial or parallel fashion.

Although specific embodiments have been illustrated and describedherein, it should be appreciated that any arrangement calculated toachieve the same purpose may be substituted for the specific embodimentsshown. This disclosure is intended to cover any and all adaptations orvariations of various embodiments. It is to be understood that the abovedescription has been made in an illustrative fashion, and not arestrictive one. Combinations of the above embodiments, and otherembodiments not specifically described herein will be apparent to thoseof skill in the art upon reviewing the above description. Thus, thescope of various embodiments includes any other applications in whichthe above compositions, structures, and methods are used.

It is emphasized that the Abstract of the Disclosure is provided tocomply with 37 C.F.R. § 1.72(b), requiring an abstract that will allowthe reader to quickly ascertain the nature of the technical disclosure.It is submitted with the understanding that it will not be used tointerpret or limit the scope or meaning of the claims. In addition, inthe foregoing Detailed Description, it can be seen that various featuresare grouped together in a single embodiment for the purpose ofstreamlining the disclosure. This method of disclosure is not to beinterpreted as reflecting an intention that the claimed embodimentsrequire more features than are expressly recited in each claim. Rather,as the following claims reflect, inventive subject matter lies in lessthan all features of a single disclosed embodiment. Thus the followingclaims are hereby incorporated into the Detailed Description, with eachclaim standing on its own as a separate preferred embodiment. In theappended claims, the terms “including” and “in which” are used as theplain-English equivalents of the respective terms “comprising” and“wherein,” respectively. Moreover, the terms “first,” “second,” and“third,” etc. are used merely as labels, and are not intended to imposenumerical requirements on their objects.

As used herein, the terms “over”, “to”, “between” and “on” may refer toa relative position of one layer with respect to other layers. One layer“over” or “on” another layer or bonded “to” another layer may bedirectly in contact with the other layer or may have one or moreintervening layers. One layer “between” layers may be directly incontact with the layers or may have one or more intervening layers.Further, the terms “attached” and “coupled” may mean directly adjacentto or in direct contact with another element or may mean in a closephysical relationship with another element without being directlyadjacent to or in direct contact with the other element.

The microelectronics packages and/or warpage control layers describedherein along with the techniques for warpage control described hereincan be implemented in or can be part of any processor within anycomputing device. The term “processor” may refer to any device orportion of a device that processes electronic data from registers and/ormemory to transform that electronic data into other electronic data thatmay be stored in registers and/or memory. In various embodiments, thecomputing device may be a laptop, a netbook, a notebook, an ultrabook, asmartphone, a tablet, a personal digital assistant (PDA), an ultramobile PC, a mobile phone, a desktop computer, a server, a printer, ascanner, a monitor, a set-top box, an entertainment control unit, adigital camera, a portable music player, or a digital video recorder. Infurther embodiments, the computing device may be any other electronicdevice that processes data.

Further, embodiments herein may describe layers as positioned under oron top of another layer but are not so limited. Such descriptions may berelative to a particular orientation of the described layers as shown inone or more figures provided herein. Accordingly, descriptions relatingto a layer on top of or below another layer may also be described asbeing on a first (e.g., lateral) side or a second opposite side ofanother layer.

Although the subject matter has been described in language specific tostructural features and/or methodological acts, it is to be understoodthat the subject matter defined in the appended claims is notnecessarily limited to the specific features or acts described above.Rather, the specific features and acts described above are disclosed asexample forms of implementing the claims.

What is claimed is:
 1. A method of fabricating a microelectronic device,comprising: attaching a microelectronics die to a top surface of acoreless substrate; attaching a stiffener to a bottom surface of thecoreless substrate using an adhesive; attaching solder to the bottomsurface of the coreless substrate; and attaching the microelectronicsdie, coreless substrate, and stiffener to a motherboard using thesolder, wherein the stiffener is positioned between the motherboard andthe coreless substrate.
 2. The method of claim 1, further comprisingselecting a thickness of the stiffener to be approximately equal to athickness of the microelectronics die.
 3. The method of claim 1, furthercomprising selecting a coefficient of thermal expansion (CTE) of thestiffener to approximately equal a CTE of the microelectronics die. 4.The method of claim 1, further comprising selecting the stiffener to bean insulating stiffener.
 5. The method of claim 1, further comprisingselecting the stiffener to be a metallic stiffener.
 6. A method offabricating a microelectronic device, comprising: providing a glassbase; forming copper pads on a top surface of the glass base; forming abuild-up layer on the top surface of the glass base and over the copperpads; forming openings in the glass base aligned with the copper pads;providing copper pillar segments in one or more interior openings of theglass base; attaching a microelectronics die to the build-up layer;depositing solder in one or more outer openings in the glass base; andattaching the build-up layer to a motherboard using the solder such thatthe glass base is positioned between the motherboard and the build-uplayer.
 7. The method of claim 6, wherein a height of each of the copperpillar segments is approximately equal to a thickness of the glass base.8. The method of claim 6, wherein a thickness of the glass base isapproximately equal to a thickness of the microelectronics die.
 9. Themethod of claim 6, wherein a coefficient of thermal expansion (CTE) ofthe glass base approximately matches a CTE of the microelectronics die.10. A method of fabricating a microelectronic device, comprising:attaching a stiffener to a bottom surface of a coreless substrate usingan adhesive, the coreless substrate comprising a microelectronics dieattached to a top surface of the coreless substrate; attaching solder tothe bottom surface of the coreless substrate; and attaching themicroelectronics die, coreless substrate, and stiffener to a motherboardusing the solder, wherein the stiffener is positioned between themotherboard and the coreless substrate.
 11. The method of claim 10,further comprising selecting a thickness of the stiffener to beapproximately equal to a thickness of the microelectronics die.
 12. Themethod of claim 10, further comprising selecting a coefficient ofthermal expansion (CTE) of the stiffener to approximately equal a CTE ofthe microelectronics die.
 13. The method of claim 10, further comprisingselecting the stiffener to be an insulating stiffener.
 14. The method ofclaim 10, further comprising selecting the stiffener to be a metallicstiffener.
 15. A method of fabricating a microelectronic device,comprising: forming copper pads on a top surface of a glass base;forming a build-up layer on the top surface of the glass base and overthe copper pads; forming openings in the glass base aligned with thecopper pads; providing copper pillar segments in one or more interioropenings of the glass base; attaching a microelectronics die to thebuild-up layer; depositing solder in one or more outer openings in theglass base; and attaching the build-up layer to a motherboard using thesolder such that the glass base is positioned between the motherboardand the build-up layer.
 16. The method of claim 15, wherein a height ofeach of the copper pillar segments is approximately equal to a thicknessof the glass base.
 17. The method of claim 15, wherein a thickness ofthe glass base is approximately equal to a thickness of themicroelectronics die.
 18. The method of claim 15, wherein a coefficientof thermal expansion (CTE) of the glass base approximately matches a CTEof the microelectronics die.